Concepedia

Kinetics of nitride formation on titanium targets during reactive sputtering

J.‐E. Sundgren, B.-O. Johansson, Susanne Karlsson

Surface Science · 1983 · 105 citations · 33 references

DOI

Concepts

References

33

Adsorption of Gases in Multimolecular Layers

Stephen Brunauer, P. H. Emmett, Edward Teller · Journal of the American Chemical Society · 1938 · 27.6K citations

, , +16

Quantitative electron spectroscopy of surfaces: A standard data base for electron inelastic mean free paths in solids

M. P. Seah, W. A. Dench · Surface and Interface Analysis · 1979 · 5.3K citations

, , +17

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

Sputtering of chemisorbed gas (nitrogen on tungsten) by low-energy ions

Harold F. Winters, Peter Sigmund · Journal of Applied Physics · 1974 · 318 citations

, , +17

Ion-Neutralization Spectroscopy of Solids and Solid Surfaces

H. D. Hagstrum · Physical Review · 1966 · 234 citations

, , +15