Applications of polyimide membranes to MEMS technology

Analysis Of A Micro-electric Generator For Microsystems

C.B. Williams, R.B. Yates · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 167 citations

Engineering, Electrical Engineering, Microelectronics +11

Applications of fluorocarbon polymers in micromechanics and micromachining

Henri Jansen, J. Elders, H.A.C. Tilmans · Sensors and Actuators A Physical · 1994 · 84 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Levitation of a micromachined rotor forapplication in a rotating gyroscope

C. Shearwood, C.B. Williams, Phil Mellor et al. · Electronics Letters · 1995 · 56 citations

Engineering, Electrical Engineering, Mechanical Engineering +13