Electronics Letters · 1995 · 56 citations · 2 references
EngineeringElectrical EngineeringMechanical EngineeringElectromagneticsMechatronicsMicroelectromechanical SystemsMagnetic ActuationMagnetic ActuatorsMems ActuatorsMems DesignMicromachiningRotordynamicsCoil DesignGyroscopesLateral StabilityMagnetic Levitation
The design of a micromachined rotating gyroscope is described, incorporating an electromagnetically levitated aluminium rotor. The coil design for levitation produces good lateral stability. A 400 µm diameter, 12 µm thick rotor is levitated to a height of 30 µm.
2