Thin film structure and adhesion of sputtered TiNi layers on silicon

Introduction to Solid State Physics

C. Kittel, Heng Fan · American Journal of Physics · 1957 · 22.4K citations

Engineering, Physics, Solid State Physics +6

Introduction to solid state physics

J. C. Woolley · Journal of the Mechanics and Physics of Solids · 1957 · 1.2K citations

Engineering, Physics, Condensed Matter Physics +6

Calculated elastic constants for stress problems associated with semiconductor devices

William A. Brantley · Journal of Applied Physics · 1973 · 1.2K citations

Engineering, Residual Stress, Semiconductors +21

Internal stresses in titanium, nickel, molybdenum, and tantalum films deposited by cylindrical magnetron sputtering

John A. Thornton, David W. Hoffman · Journal of Vacuum Science and Technology · 1977 · 297 citations

Thin Film Physics, Engineering, Tantalum Films +24

Internal stresses in Cr, Mo, Ta, and Pt films deposited by sputtering from a planar magnetron source

David W. Hoffman, John A. Thornton · Journal of Vacuum Science and Technology · 1982 · 255 citations

Engineering, Planar Magnetron Source, Thin Film Process Technology +21