Publication | Closed Access

Development of a piezoelectrically actuated two-degree-of-freedom fast tool servo with decoupled motions for micro-/nanomachining

EngineeringSoft RoboticsDecoupled MotionsMicrofabricationPiezoelectric NanogeneratorsMicromachinesMechanical EngineeringMechatronicsMechanical SystemsBiomimetic ActuatorActuationMicroactuatorRoboticsVibration Control