Concepedia

Simulation of linear magnetron discharges in 2D and 3D

Andreas Pflug, Michael Siemers, Thomas Melzig, Lothar Schäfer

Surface and Coatings Technology · 2014 · 42 citations · 13 references

DOI

Concepts

References

13

The application of scattering cross sections to ion flux models in discharge sheaths

A. V. Phelps · Journal of Applied Physics · 1994 · 445 citations

, , +15

Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering

André Anders, P. Ni, Albert Rauch · Journal of Applied Physics · 2012 · 172 citations · Full text

, , +15

Measurement of free-free emission from low-energy-electron collisions with Ar

Chobei Yamabe, S J Buckman, A. V. Phelps · Physical review. A, General physics · 1983 · 159 citations

, , +11

High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization

Arutiun P. Ehiasarian, Ante Hećimović, Teresa de los Arcos et al. · Applied Physics Letters · 2012 · 123 citations

, , +15

Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge

A. V. Kozyrev, A. N. Odivanova · Plasma Physics Reports · 2011 · 100 citations

, , +16