Advanced Engineering Materials · 2004 · 66 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsOptical MaterialsPolymer MaterialsConductive PolymersNanocompositesOptical PolymersOptoelectronic MaterialsPlasmonic NanomaterialsPolymer NanocompositesConductive NanocompositesElectrical Conductivity MeasurementsElectrical PropertiesFiller MaterialsLateral ResolutionNanoparticlesPhotopolymer MaterialsPhotosensitive Materials
A photosensitive composite resist having electrical properties has been developed for the direct photopatterning of electrically conductive microcomponents. This composite material is based on the dispersion of silver nanoparticles into the SU‐8 photopolymer, an insulating negative‐tone photoresist. Electrical and optical characterizations reveal a wide range of electrical conductivity of the composite structures depending of the filler load, and a lateral resolution better than 5 μm.
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Scott Kirkpatrick · Reviews of Modern Physics · 1973 · 5.2K citations
SU-8: a low-cost negative resist for MEMS
H. Lorenz, M. Despont, N. Fahrni et al. · Journal of Micromechanics and Microengineering · 1997 · 972 citations · Full text