Concepedia
CIRP Annals · 1997 · 12 citations · 2 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsPhotonicsThin FilmsIntegrated OpticsOptical MemsOptical ModulatorsOptical Thin FilmsReflectionThin Film Optical PropertiesMicromirror ArraysMicromirrorsMirror OpticsReflective MaterialsThin-film Refractive Index
2
Theoretical modeling of microfabricated beams with elastically restrained supports
Qingyuan Meng, Mehran Mehregany, Robert L. Mullen · Journal of Microelectromechanical Systems · 1993 · 65 citations
Engineering, Mechanical Engineering, Finite Element Analysis +16
Characterization of the mechanisms producing bending moments in polysilicon micro-cantilever beams by interferometric deflection measurements
T.A. Lober, Junling Huang, Martin A. Schmidt et al. · 2003 · 28 citations
Engineering, Materials Engineering, Materials Science +17