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Substrate current enhancement in 65 nm metal-oxide-silicon field-effect transistor under external mechanical stress

Electrical EngineeringEngineeringMicrofabricationNanoelectronicsStress-induced Leakage CurrentBias Temperature InstabilityApplied PhysicsSubstrate Current EnhancementSemiconductor Device FabricationElectronic PackagingSilicon On InsulatorMicroelectronicsExternal Mechanical StressSemiconductor Device