Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices

Abstract

In this research, electroplated magnetically isotropic and anisotropic soft alloys and screen-printed soft ferrites applicable to micromachined micromagnetic devices are fabricated and characterized using in situ measurement techniques. Appropriate magnetic materials and deposition methods, such as electroplating and screen-printing techniques, are examined and material test structures are fabricated. Following material characterization, micromachined inductors with three-dimensional structure are fabricated to determine the usefulness of the magnetic materials and deposition methods. The micromachined inductor is a key component and geometry for realizing micromagnetic devices such as amplifiers, filters, sensors and actuators.