Applied Surface Science · 2014 · 40 citations · 31 references
Materials ScienceMaterials EngineeringDc-magnetron SputteringAluminium NitrideEngineeringOxide ElectronicsSurface ScienceApplied PhysicsAl FilmsThin FilmsCeramic TargetsThin Film Processing
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Surface Studies of Solids by Total Reflection of X-Rays
L. G. Parratt · Physical Review · 1954 · 5.1K citations