Pulsed laser deposition of high Mg-content MgZnO films: Effects of substrate temperature and oxygen pressure

Abstract

High Mg-content, wurtzite MgZnO films were grown on sapphire (0001) substrates by pulsed laser deposition. It was found that the compositions, defect states, optical, and electrical properties of MgZnO films depend critically on the substrate temperature and oxygen pressure. As the substrate temperature increases, Mg content in single-phase wurtzite MgZnO films increases significantly from 27 close to 46 at. %, and corresponding band gap is widened from 3.49 to 3.88 eV. X-ray photoelectron spectroscopy studies show that plenty of Zn interstitials are present in MgZnO films grown at lower oxygen pressures, which lead to the lattice expansion and the high electron concentration as native donor defects; while the films grown at higher oxygen pressure exhibit high resistivity with indeterminate conductivity type and the relatively wide band gap.