Publication | Closed Access
Megaelectronvolt implantations in silicon very-large-scale integration
29
Citations
13
References
1989
Year
Electrical EngineeringMegaelectronvolt ImplantationsEngineeringDevice IntegrationMicrofabricationNanoelectronicsSemiconductor Device FabricationVlsiSilicon On InsulatorMicroelectronics
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