Concepedia

Friction Measurement in MEMS Using a New Test Structure

B. T. Crozier, Maarten P. Boer, James M. Redmond, David F. Bahr, Terry A. Michalské

MRS Proceedings · 1999 · 11 citations · 4 references

Open access

Concepts

EngineeringMaterials ScienceMechanical EngineeringInstrumentationMetrologyMicroelectromechanical SystemsFriction ModelingMems CharacterizationMems DesignMems MaterialsMems TestingMicrofabrication MetrologyFrictionFriction MeasurementMechanical Testing Of Mems DevicesMems MetrologyNon-destructive Evaluation Of Mems

References

4

A simple experimental technique for the measurement of the work of adhesion of microstructures

Carlos H. Mastrangelo, C.H. Hsu · 2003 · 164 citations

Natural Sciences, Materials Engineering, Materials Science +13

Relationship between adhesion and friction forces

Jacob N. Israelachvili, You‐Lung Chen, Hisae Yoshizawa · Journal of Adhesion Science and Technology · 1994 · 132 citations

Engineering, Materials Science, Mechanical Engineering +17

Performance Impact of Monolayer Coating of Polysilicon Micromotors

Keren Deng, Rochael J. Collins, Mehran Mehregany et al. · Journal of The Electrochemical Society · 1995 · 78 citations

Engineering, Materials Science, Mechanical Engineering +16

Multi-layer enhancement to polysilicon surface-micromachining technology

J.J. Sniegowski, M.S. Rodgers · 2002 · 41 citations · Full text

Engineering, Materials Engineering, Materials Science +17