Sensors and Actuators A Physical · 2014 · 19 citations · 10 references
EngineeringElectrical EngineeringMechanical EngineeringApplied MechanicsMechanical Behavior Of MaterialsMicroelectromechanical SystemsContact DynamicsContact MechanicsMems DesignMems ModelingMems ResonatorsMems SimulationContact Time EffectsMicroactuatorsMicroelectromechanical ActuatorsMicroelectromechanical SwitchesMicromachined Switch DesignMicroswitchesSwitch Modeling
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Lars Zimmermann, J.Ph. Ebersohl, Fu-Lian Hung et al. · Sensors and Actuators A Physical · 1995 · 141 citations
Engineering, Mechatronics Engineering, Systems Engineering +17