Sensors and Actuators A Physical · 2014 · 62 citations · 29 references
EngineeringBiomedical EngineeringElectrical EngineeringBiosensorsMicroelectromechanical SystemsSensorsElectrical SensorsMems SensorsMicrowave Passive ComponentsMicrowave ResonatorsPressure MeasurementPressure SensorsPressure Measurement In Harsh EnvironmentsPressure SensingPressure Wave SensorsWireless Pressure SensorsWireless Sensing
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High-Temperature Single-Crystal 3C-SiC Capacitive Pressure Sensor
Darrin J. Young, Jian Du, Christian A. Zorman et al. · IEEE Sensors Journal · 2004 · 221 citations
2003 IEEE MTT-S International Microwave Symposium Digest
2003 · 138 citations