Low temperature SiNx:H films deposited by inductively coupled plasma for solar cell applications

Contactless determination of current–voltage characteristics and minority-carrier lifetimes in semiconductors from quasi-steady-state photoconductance data

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The hydrogen content of plasma-deposited silicon nitride

W. A. Lanford, Myron J. Rand · Journal of Applied Physics · 1978 · 782 citations

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Detailed study of the composition of hydrogenated SiNx layers for high-quality silicon surface passivation

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Deposition of silicon dioxide and silicon nitride by remote plasma enhanced chemical vapor deposition

G. Lucovsky, P. D. Richard, D. V. Tsu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 238 citations

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Experimental evidence of parasitic shunting in silicon nitride rear surface passivated solar cells

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