Distribution of Deep Level Parameters in Spectral Analysis of DLTS (SADLTS)

Abstract

It is shown that one can estimate the broadening parameters of both the capture cross section σ and the activation energy E of a deep level from the emission rate spectrum S(λ, T) of the transient capacitance ΔC(t, T) obtained in a spectral analysis of the DLTS(SADLTS) proposed in our previous paper. Numerical examples are given to illustrate typical cases of interest for an idealized model of independent Gaussian distributions, f(σ) and g(E). In general, S(λ, T) is a convolution of f and g with its higher and lower λ side characterized by broadening parameters for σ and E, respectively. A simple formula is derived in order to obtain the central value E of the activation energy.