Publication | Closed Access
The characterization of etched GaAs surface with HCl or H3PO4 solutions
29
Citations
19
References
1997
Year
Materials ScienceElectrical EngineeringEngineeringEtched Gaas SurfaceSurface ScienceApplied PhysicsSemiconductor MaterialH3po4 SolutionsCompound SemiconductorSemiconductor Device
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