Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions

Determination of the thickness and optical constants of amorphous silicon

R. Swanepoel · Journal of Physics E Scientific Instruments · 1983 · 3.9K citations

Natural Sciences, Materials Engineering, Materials Science +17

On the properties of AlN thin films grown by low temperature reactive r.f. sputtering

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Natural Sciences, Materials Engineering, Materials Science +14

Optical characterization of AlN films grown by plasma source molecular beam epitaxy

Regina Y. Krupitskaya, Gregory W. Auner · Journal of Applied Physics · 1998 · 35 citations · Full text

Natural Sciences, Materials Science, Physics +17

Optical properties of AlN thin films correlated with sputtering conditions

M. Gadenne, J Plon, P. Gadenne · Thin Solid Films · 1998 · 29 citations

Natural Sciences, Materials Science, Physics +16

Competitive gettering of copper in Czochralski silicon by implantation-induced cavities and internal gettering sites

Scott A. McHugo, E. R. Weber, S. M. Myers et al. · Applied Physics Letters · 1996 · 26 citations

Engineering, Materials Engineering, Materials Science +12