Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions - Concepedia

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Optical and dielectric properties of dc magnetron sputtered AlN thin films correlated with deposition conditions

37

Citations

7

References

1999

Year

V. Dimitrova, D. Manova, E. Valcheva

Materials Science and Engineering B

Materials ScienceDielectric PropertiesAluminium NitrideOptical MaterialsEngineeringOptical PropertiesApplied PhysicsDc MagnetronMagnetic Thin FilmsThin FilmsPulsed Laser DepositionChemical Vapor DepositionAln Thin FilmsThin Film Processing

References

	Year	Citations

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