Optical properties of AlN thin films correlated with sputtering conditions - Concepedia

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Optical properties of AlN thin films correlated with sputtering conditions

29

Citations

6

References

1998

Year

M. Gadenne, J Plon, P. Gadenne

Thin Solid Films

Materials ScienceAluminium NitrideOptical MaterialsEngineeringPhysicsOptical PropertiesSurface ScienceApplied PhysicsThin FilmsPulsed Laser DepositionOptoelectronicsAln Thin FilmsThin Film ProcessingDepth-graded Multilayer Coating

References

	Year	Citations

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