Thin Solid Films · 1986 · 65 citations · 7 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials PhysicsSurface ScienceThin FilmsAluminum OxidesMetalsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsAlumina Thin FilmsFilm Growth MechanismsReactive SputteringSputter DepositionSputtering
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Epitaxially grown AlN and its optical band gap
Woosoon Yim, E. J. Stofko, P. J. Zanzucchi et al. · Journal of Applied Physics · 1973 · 600 citations
Natural Sciences, Materials Engineering, Materials Science +17