Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

Silicon carbide MEMS for harsh environments

Mehran Mehregany, Christian A. Zorman, N. Rajan et al. · Proceedings of the IEEE · 1998 · 457 citations

Materials Science, Materials Engineering, Electrical Engineering +15

Silicon carbide as a new MEMS technology

P.M. Sarro · Sensors and Actuators A Physical · 2000 · 414 citations

Materials Science, Engineering, Microfabrication +6

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

A.R. Krauss, Orlando Auciello, D. M. Gruen et al. · Diamond and Related Materials · 2001 · 365 citations

Materials Science, Diamond-like Carbon, Engineering +10

Amorphous TiO2 films with high refractive index deposited by pulsed bias arc ion plating

Min Zhang, Guoqiang Lin, Chuang Dong et al. · Surface and Coatings Technology · 2007 · 128 citations

Materials Engineering, Materials Science, High Refractive Index +9

On the dielectric properties of dc magnetron TiO2 thin films

Marius Stamate · Applied Surface Science · 2003 · 115 citations

Materials Engineering, Magnetism, Materials Science +10