Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices - Concepedia

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Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices

365

Citations

35

References

2001

Year

A.R. Krauss, Orlando Auciello, D. M. Gruen, Ahalapitiya H. Jayatissa, Anirudha V. Sumant, J. Tuček, Derrick C. Mancini, N. Moldovan, Ali Erdemir, Daniel Ersoy,

Diamond and Related Materials

Materials ScienceDiamond-like CarbonEngineeringMicromachinesMicrofabricationNanotechnologyMechanical EngineeringApplied PhysicsNano Electro Mechanical SystemThin Film Process TechnologyThin FilmsMicro-electromechanical SystemMechanical Assembly Devices

References

	Year	Citations

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