Near room temperature droplet epitaxy for fabrication of InAs quantum dots

Jong Su Kim, Nobuyuki Koguchi

Applied Physics Letters · 2004 · 114 citations · 19 references

Concepts

Abstract

By using the droplet epitaxy method, we succeed in fabricating the InAs quantum dots (QDs) with the spatial density of 4×1010∕cm2 and an average lateral size of 20nm on GaAs (001) at the droplets deposition temperature of 50°C and subsequent annealing process under As4 flux. These QDs shows the intense photoluminescence even at room temperature indicating that high-quality InAs QDs can be fabricated by near room temperature droplets deposition and crystallization process by 400°C in situ annealing.

References

19