Fabrication of SU-8 embedded microchannels with circular cross-section

Microfluidic systems with on-line UV detection fabricated in photodefinable epoxy

Rebecca J. Jackman, Tamara M. Floyd, Reza Ghodssi et al. · Journal of Micromechanics and Microengineering · 2001 · 215 citations

Engineering, Materials Engineering, Materials Science +15

Simple and low cost fabrication of embedded micro-channels by using a new thick-film photoplastic

L. Guérin, M. Bossel, Michel Demierre et al. · 2002 · 138 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +17

A novel micro-machining method for the fabrication of thick-film SU-8 embedded micro-channels

Francis E. H. Tay, J.A. van Kan, F. Watt et al. · Journal of Micromechanics and Microengineering · 2000 · 132 citations

Engineering, Materials Engineering, Materials Science +15

Fabrication of star grooves and rhombus grooves micro heat pipe

Shung‐Wen Kang, Derlin Huang · Journal of Micromechanics and Microengineering · 2002 · 84 citations

Engineering, Materials Science, Mechanical Engineering +16

In situ monitoring and universal modelling of sacrificial PSG etching using hydrofluoric acid

Julie C. Liu, Yuan‐Chuan Tai, J. Lee et al. · 2002 · 53 citations

Engineering, Materials Engineering, Materials Science +17