Focused ion beam-induced fabrication of tungsten structures

Abstract

Sidewall morphology on three-dimensional (3D) tungsten structures grown with focused ion beam-induced chemical vapor deposition (FIB-CVD) using tungsten hexacarbonyl [W(CO)6] was improved with a milling process by using FIB treatment subsequent to growth. As a result, Young’s modulus was measured at 300 GPa at maximum and density was measured at 13.0×103 kg/m3. Young’s modulus increased 35% after heat treatment at 600 °C in a vacuum while density did not change. Transmission electron microscopy revealed crystallization of tungsten trioxide after the heat treatment.