Low temperature dependence three-axis accelerometer for high temperature environments with temperature control of SOI piezoresistors

Anisotropic etching of silicon in TMAH solutions

Osamu Tabata, Ryouji Asahi, Hirofumi Funabashi et al. · Sensors and Actuators A Physical · 1992 · 458 citations

Engineering, Materials Engineering, Materials Science +14

A CMOS integrated three-axis accelerometer fabricated with commercial submicrometer CMOS technology and bulk-micromachining

Hidekuni Takao, Hisao Fukumoto, Masatoshi Ishida · IEEE Transactions on Electron Devices · 2001 · 51 citations

Engineering, Electrical Engineering, Mechatronics Engineering +17

A monolithically integrated three-axis accelerometer using CMOS compatible stress-sensitive differential amplifiers

Hidekuni Takao, Yoshinori Matsumoto, Masatoshi Ishida · IEEE Transactions on Electron Devices · 1999 · 37 citations

Engineering, Electrical Engineering, Analog Electronics +16

Analysis and design considerations of three-dimensional vector accelerometer using SOI structure for wide temperature range

Hidekuni Takao, Yoshinori Matsumoto, Hee-Don Seo et al. · Sensors and Actuators A Physical · 1996 · 36 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Stress-sensitive differential amplifiers using piezoresistive effects of MOSFETs and their application to three-axial accelerometers

Hidekuni Takao, Yoshinori Matsumoto, Mákoto Ishida · Sensors and Actuators A Physical · 1998 · 32 citations

Engineering, Electrical Engineering, Microelectronics +15