Germanium nanoparticle formation in thin oxide films on Si by negative-ion implantation

Hiroshi Tsuji, Nobutoshi Arai, Naoyuki Gotoh, Takashi Minotani, Toyotsugu Ishibashi, Tetsuya Okumine, Kouichiro Adachi, Hiroshi Kotaki, Yasuhito Gotoh, Junzo Ishikawa

Surface and Coatings Technology · 2007 · 16 citations · 13 references

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