Effects of environmental temperature on the performance of a micromachined gyroscope

Simulating the behavior of MEMS devices: computational methods and needs

S.D. Senturia, N. Azuru, Jacob White · IEEE Computational Science and Engineering · 1997 · 168 citations

Mems Devices, Engineering, Mechanical Engineering +19

Mechanical-thermal noise in MEMS gyroscopes

R.P. Leland · IEEE Sensors Journal · 2005 · 156 citations

Engineering, Measurement, Mechanical Engineering +17

A novel topology design scheme for the multi-physics problems of electro-thermally actuated compliant micromechanisms

Luzhong Yin, G. K. Ananthasuresh · Sensors and Actuators A Physical · 2002 · 122 citations

Engineering, Micromechanics, Mechanical Engineering +16

Temperature dependent characteristics of the JPL silicon MEMS gyroscope

K. Shcheglov, C. Evans, R.C. Gutierrez et al. · 2002 · 87 citations

Sensor Calibration, Engineering, Micromachines +15

Reliability-based analysis and design optimization of electrostatically actuated MEMS

Matthew S. Allen, Michael Raulli, Kurt Maute et al. · Computers & Structures · 2004 · 85 citations

Engineering, Microfabrication, Mechanical Engineering +5