Concepedia

Single molecular precursor metal-organic chemical vapor deposition of MgAl<sub>2</sub>O<sub>4</sub> thin films

Jiming Zhang, Gregory T. Stauf, Robin Gardiner, Peter Van Buskirk, J. Steinbeck

Journal of materials research/Pratt's guide to venture capital sources · 1994 · 15 citations · 10 references

DOI

Concepts

References

10

Handbook of Thin-Film Deposition Processes and Techniques

M. Henini · Microelectronics Journal · 2000 · 294 citations

, , +9

Deposition of silicon dioxide and silicon nitride by remote plasma enhanced chemical vapor deposition

G. Lucovsky, P. D. Richard, D. V. Tsu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 237 citations

, , +16

The System MgO–MgAl <sub>2</sub> O <sub>4</sub>

Allen M. Alper, R. N. McNally, P. H. Ribbe et al. · Journal of the American Ceramic Society · 1962 · 210 citations

Preparation of epitaxial ABO3 perovskite-type oxide thin films on a (100)MgAl2O4/Si substrate

S. Matsubara, S. Miura, Yoichi Miyasaka et al. · Journal of Applied Physics · 1989 · 74 citations

, , +16

Single liquid source plasma-enhanced metalorganic chemical vapor deposition of high-quality YBa2Cu3O7−<i>x</i> thin films

Jiming Zhang, R. A. Gardiner, Peter S. Kirlin et al. · Applied Physics Letters · 1992 · 63 citations

, , +12