Peter S. Kirlin

Volatile barium .beta.-diketonate polyether adducts. Synthesis, characterization, and metalloorganic chemical vapor deposition

Robin Gardiner, David W. Brown, Peter S. Kirlin et al. · Chemistry of Materials · 1991 · 124 citations

Natural Sciences, Chemistry, Materials Science +7

Metalorganic Chemical Vapor Deposition of Complex Metal Oxide Thin Films by Liquid Source Chemical Vapor Deposition

Peter C. Van Buskirk, Steve Bilodeau, Jeffrey F. Roeder et al. · Japanese Journal of Applied Physics · 1996 · 63 citations

Natural Sciences, Materials Engineering, Materials Science +16

Single liquid source plasma-enhanced metalorganic chemical vapor deposition of high-quality YBa2Cu3O7−<i>x</i> thin films

Jiming Zhang, R. A. Gardiner, Peter S. Kirlin et al. · Applied Physics Letters · 1992 · 63 citations

Natural Sciences, Materials Engineering, Materials Science +13

MOCVD of BaSrTiO₃ for ulsi drams

Peter S. Kirlin, Steve Bilodeau, Peter Van Buskirk · Integrated ferroelectrics · 1995 · 56 citations

Engineering, Materials Engineering, Materials Science +16

Reduced-pressure MOCVD of highly crystalline BaTiO₃ thin films

Peter C. Van Buskirk, Robin Gardiner, Peter S. Kirlin et al. · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 31 citations

Natural Sciences, Materials Engineering, Materials Science +11