Recoil range distributions in multilayered targets

Energy Dissipation by Ions in the kev Region

J. Lindhard, M. Scharff · Physical Review · 1961 · 1.4K citations

Thomas-fermi Type, Engineering, Physics +13

Calculations of nuclear stopping, ranges, and straggling in the low-energy region

W. D. Wilson, L.G. Haggmark, J.P. Biersack · Physical review. B, Solid state · 1977 · 804 citations

Engineering, Nuclear Physics, Low-energy Region +17

Sputtering Calculations with the Discrete-Ordinates Method

Thomas J. Hoffman, H.L. Dodds, M. T. Robinson et al. · Nuclear Science and Engineering · 1978 · 35 citations

Numerical Analysis, Computational Complexity Theory, Engineering +16

The effects of the recoil-implanted oxygen in Si on the electrical activation of As after through-oxide implantation

Takashi Hirao, G. Fuse, Koji Inoue et al. · Journal of Applied Physics · 1979 · 24 citations · Full text

Materials Science, Semiconductor Technology, Electrical Engineering +13

MOS measurement of oxygen recoils from As implantation into silicon dioxide

A. Goetzberger, D. J. Bartelink, J.P. McVittie et al. · Applied Physics Letters · 1976 · 18 citations

Engineering, Recoil Oxygen, Silicon On Insulator +16