Atomic layer deposition of ytterbium oxide using -diketonate and ozone precursors - Concepedia

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Atomic layer deposition of ytterbium oxide using -diketonate and ozone precursors

23

Citations

19

References

2009

Year

Markus Bosund, Kenichiro Mizohata, T. Hakkarainen, Matti Putkonen, Mikko Söderlund, Seppo Honkanen, Harri Lipsanen

Applied Surface Science

Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsChemical DepositionOzone PrecursorsChemical Vapor DepositionAtomic Layer Deposition

References

	Year	Citations

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