Materials & Design (1980-2015) · 2010 · 34 citations · 10 references
EngineeringMaterials EngineeringMaterials ScienceActuatorsMicroelectromechanical SystemsMicrofabricationElectrostatic ActuationElectrostatic ActuatorsMems DesignMems MaterialsMicrofabrication MaterialsMicrofabrication ProcessesElectrostatic Mems ActuatorsElectrostatic MicroactuatorsElectrostatic Microelectromechanical SystemsFabrication Of Electrostatic ActuatorsFabrication OptimizationFabrication TechniquesMicroactuators
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Materials issues in microelectromechanical systems (MEMS)
S.M. Spearing · Acta Materialia · 2000 · 652 citations