Germanium substrate loss during thermal processing

Germanium MOSFET Devices: Advances in Materials Understanding, Process Development, and Electrical Performance

D.P. Brunco, Brice De Jaeger, Geert Eneman et al. · Journal of The Electrochemical Society · 2008 · 265 citations

Engineering, Materials Engineering, Materials Science +17

Implantation and diffusion of phosphorous in germanium

A. Chroneos, D. Skarlatos, C. Tsamis et al. · Materials Science in Semiconductor Processing · 2006 · 67 citations

Engineering, Materials Engineering, Materials Science +7

Thermochemical study of the germanium oxides using a mass spectrometer. Dissociation energy of the molecule GeO

J. Drowart, F. Degrève, G. Verhaegen et al. · Transactions of the Faraday Society · 1965 · 52 citations · Full text

Natural Sciences, Chemistry, Materials Science +11

Rates of Oxidation of Germanium

Junhui Law, P. S. Meigs · Journal of The Electrochemical Society · 1957 · 50 citations

Natural Sciences, Chemistry, Materials Science +16

Germanium substrate loss during low temperature annealing and its influence on ion-implanted phosphorous dose loss

N. Ioannou, D. Skarlatos, C. Tsamis et al. · Applied Physics Letters · 2008 · 44 citations

Engineering, Materials Engineering, Materials Science +17