Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering - Concepedia

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Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering

44

Citations

7

References

2007

Year

Florian Ruske, Andreas Pflug, V. Sittinger, Wolfgang Werner, Bernd Szyszka, D.J. Christie

Thin Solid Films

Materials ScienceEngineeringReactive DepositionOxide ElectronicsSurface ScienceApplied PhysicsMagnetron SputteringThin FilmsPulsed Laser DepositionChemical DepositionThin Film Processing

References

	Year	Citations

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