Stresses in sputtered tungsten thin films

Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings

John A. Thornton · Journal of Vacuum Science and Technology · 1974 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

The microstructure of sputter‐deposited coatings

John A. Thornton · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 1.3K citations

Natural Sciences, Materials Engineering, Materials Science +16

Stresses in thin films: The relevance of grain boundaries and impurities

R. W. Hoffman · Thin Solid Films · 1976 · 462 citations

Natural Sciences, Materials Engineering, Materials Science +14

Grain Growth and Stress Relief in Thin Films

P. Chaudhari · Journal of Vacuum Science and Technology · 1972 · 314 citations

Natural Sciences, Materials Engineering, Materials Science +16

Aluminum films deposited by rf sputtering

F. M. d’Heurle · Metallurgical Transactions · 1970 · 270 citations

Natural Sciences, Materials Engineering, Materials Science +13