Applied Physics A · 1999 · 16 citations · 0 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsSemiconductor MaterialsThin FilmsAmorphous Electronic MaterialsAmorphous MaterialsAmorphous SemiconductorsCompound SemiconductorsSemiconductor Device MaterialsSilicon MaterialsNitride Thin FilmsNitrides DepositionNitrides Thin FilmsPlasma-assisted NitridationSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Nitride Ceramics