In situ investigation of polymorphous silicon deposition

Cross‐Sections, Rate Constants and Transport Coefficients in Silane Plasma Chemistry

J. Perrin, O. Leroy, Marie‐Claude Bordage · Contributions to Plasma Physics · 1996 · 350 citations

Natural Sciences, Chemistry, Physics +17

Real-time spectroscopic ellipsometry study of the growth of amorphous and microcrystalline silicon thin films prepared by alternating silicon deposition and hydrogen plasma treatment

N. Layadi, Pere Roca i Cabarrocas, B. Drévillon et al. · Physical review. B, Condensed matter · 1995 · 138 citations

Natural Sciences, Materials Engineering, Materials Science +17

Midgap density of states in hydrogenated polymorphous silicon

M. Meaudre, R. Meaudre, R. Butté et al. · Journal of Applied Physics · 1999 · 95 citations · Full text

Natural Sciences, Materials Science, Physics +17

Nanoparticle formation in low-pressure silane plasmas: bridging the gap between a-Si:H and μc-Si films

Pere Roca i Cabarrocas, S. Hamma, Shailesh Narain Sharma et al. · Journal of Non-Crystalline Solids · 1998 · 88 citations

Natural Sciences, Materials Science, Physics +16

Plasma Enhanced Chemical Vapour Deposition of Hydrogenated Amorphous Silicon from Dichlorosilane and Silane Gas Mixtures

Ian S. Osborne, Nobuhiro Hata, Akihisa Matsuda · Japanese Journal of Applied Physics · 1995 · 21 citations

Natural Sciences, Materials Science, Physics +17