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Nanoparticle formation in low-pressure silane plasmas: bridging the gap between a-Si:H and μc-Si films

Materials ScienceEngineeringNanomaterialsNanotechnologySurface ScienceApplied PhysicsPlasma PhysicsLow-pressure Silane PlasmasμC-si FilmsChemical Vapor DepositionPlasma ProcessingNanoparticle Formation