Nanoparticle formation in low-pressure silane plasmas: bridging the gap between a-Si:H and μc-Si films

Infrared absorption strength and hydrogen content of hydrogenated amorphous silicon

A. A. Langford, M. L. Fleet, B. P. Nelson et al. · Physical review. B, Condensed matter · 1992 · 625 citations

Natural Sciences, Chemistry, Materials Science +17

A thermodynamic criterion of the crystalline-to-amorphous transition in silicon

S. Vepřek, Zafar Iqbal, F.-A. Sarott · Philosophical Magazine B · 1982 · 289 citations

Natural Sciences, Materials Engineering, Materials Science +17

Temperature dependence of the sticking and loss probabilities of silyl radicals on hydrogenated amorphous silicon

Akihisa Matsuda, Katsuhiko Nomoto, Yoshiaki Takeuchi et al. · Surface Science · 1990 · 262 citations

Natural Sciences, Chemistry, Materials Science +13

A fully automated hot-wall multiplasma-monochamber reactor for thin film deposition

Pere Roca I Cabarrocas, J.B. Chevrier, J. Huc et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 232 citations · Full text

Natural Sciences, Materials Engineering, Physics +15

Spatially resolved optical emission and electrical properties of SiH₄RF discharges at 13.56 MHz in a symmetric parallel-plate configuration

Clara Bohm, J. Perrin · Journal of Physics D Applied Physics · 1991 · 137 citations

Natural Sciences, Electrical Engineering, Physics +15