Interaction of anti-adhesive silicone films with UV embossing resin

Alkyltrichlorosilane-based self-assembled monolayer films for stiction reduction in silicon micromachines

U. Srinivasan, M.R. Houston, Roger T. Howe et al. · Journal of Microelectromechanical Systems · 1998 · 425 citations

Engineering, Materials Engineering, Materials Science +17

Patterning Mammalian Cells Using Elastomeric Membranes

Emanuele Ostuni, Ravi S. Kane, Christopher S. Chen et al. · Langmuir · 2000 · 314 citations

Engineering, Bioengineering, Biomedical Engineering +16

Improving stamps for 10 nm level wafer scale nanoimprint lithography

M. Beck, Mariusz Graczyk, Ivan Maximov et al. · Microelectronic Engineering · 2002 · 268 citations

Engineering, Materials Engineering, Materials Science +14

The deposition of anti-adhesive ultra-thin teflon-like films and their interaction with polymers during hot embossing

R.W. Jaszewski, Helmut Schift, B. Schnyder et al. · Applied Surface Science · 1999 · 145 citations

Natural Sciences, Materials Engineering, Materials Science +12

Surface Characterization of Laser-Ablated Polymers Used for Microfluidics

David Pugmire, Emanuel Waddell, Richard T. Haasch et al. · Analytical Chemistry · 2002 · 107 citations

Natural Sciences, Materials Engineering, Materials Science +15