Microelectronic Engineering · 2011 · 11 citations · 13 references
EngineeringMaterials ScienceMechanical EngineeringMicroelectromechanical SystemsMicrofabricationUltrasoundMems DesignMems FabricationMems MaterialsMicrofabrication MaterialsUltrasonicsUltrasound InstrumentationBonding In Microelectromechanical Systems FabricationPolymers In Mems FabricationUltrasonic PropagationWafer Bonding MaterialsWafer-to-wafer Bonding
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Micro Total Analysis Systems: Latest Achievements
Jonathan West, Marco Becker, Sven Tombrink et al. · Analytical Chemistry · 2008 · 419 citations
Ultrasonic Bonding for MEMS Sealing and Packaging
Jongbaeg Kim, Bongwon Jeong, Mu Chiao et al. · IEEE Transactions on Advanced Packaging · 2009 · 69 citations