Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 53 citations · 37 references
Natural SciencesMaterials SciencePhysicsCondensed Matter PhysicsPlasma PhysicsSurface ScienceHeavy-ion PhysicsHigh-temperature PlasmasLow-temperature PlasmasStates Of MatterInteraction Of Heavy Ions With MatterSputter DepositionSputteringSputtering ProcessesSputtering Techniques
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