Sputtering from elastic-collision spikes in heavy-ion-bombarded metals

Abstract

Estimates are presented for the sputtering yield as well as the specturm of sputtered atoms for metals bombarded by heavy atomic or molecular ions, under the assumption of evaporation from an elastic-collision spike of high initial temperature. The calculational is based on a cylindrical spike and a thermal diffusivity proportional to the square root of the temperature. Good qualitative agreement is obtained between calculated and measured sputter yields for antimony incident on silver.