Microprobe as implanter for semiconductor devices

Ion beam synthesis of epitaxial silicides: fabrication, characterization and applications

S. Mantl · Materials Science Reports · 1992 · 256 citations

Engineering, Materials Engineering, Materials Science +14

Ion beam synthesis of buried metallic and semiconducting silicides

S. Mantl · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1993 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +7

High energy implantation by ion projection

Jan Meijer, A. Stephan · Microelectronic Engineering · 1998 · 14 citations

Natural Sciences, Physics, Plasma Physics +4

Progress in ion projection lithography

A. Chalupka, J. Fegerl, R. Fischer et al. · Microelectronic Engineering · 1992 · 13 citations

Engineering, Materials Science, Electronic Materials +6