Microelectronic Engineering · 1998 · 14 citations · 1 references
Natural SciencesPhysicsPlasma PhysicsImplant TechnologyIon ImplantationIonization ProcessesIon Source Design
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Progress in ion projection lithography
A. Chalupka, J. Fegerl, R. Fischer et al. · Microelectronic Engineering · 1992 · 13 citations