CMOS as sensor technology

An integrated mass flow sensor with on-chip CMOS interface circuitry

Eui-Sung Yoon, K.D. Wise · IEEE Transactions on Electron Devices · 1992 · 130 citations

Engineering, Automotive Engineering, Electrical Engineering +17

Light-emitting devices in industrial CMOS technology

J. Krämer, Peter Seitz, E. F. Steigmeier et al. · Sensors and Actuators A Physical · 1993 · 100 citations

Engineering, Computer Engineering, Electrical Engineering +14

Silicon gas flow sensors using industrial CMOS and bipolar IC technology

David Moser, R. Lenggenhager, H. Baltes · Sensors and Actuators A Physical · 1991 · 99 citations

Engineering, Computer Engineering, Electrical Engineering +16

A Microstructure For Measurement Of Thermal Conductivity Of Polysilicon Thin Films

F. Völklein, H. Balles · Journal of Microelectromechanical Systems · 1992 · 98 citations

Engineering, Electrical Engineering, Materials Science +17

Smart temperature sensor in CMOS technology

P. Krummenacher, H. Oguey · Sensors and Actuators A Physical · 1990 · 84 citations

Engineering, Computer Engineering, Electrical Engineering +14