Excimer laser micro machining: fabrication and applications of dielectric masks

The influence of thermal diffusion on laser ablation of metal films

E. Matthias, Michael Reichling, Jan Siegel et al. · Applied Physics A · 1994 · 201 citations

Natural Sciences, Materials Engineering, Materials Science +15

Excimer laser ablation of polyimide in a manufacturing facility

J. R. Lankard, Gerhard E. Wolbold · Applied Physics A · 1992 · 88 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Excimer laser micromachining for rapid fabrication of diffractive optical elements

Gregory P. Behrmann, Michael T. Duignan · Applied Optics · 1997 · 70 citations

Engineering, Manufacturing Engineering, Materials Science +16

UV-laser ablation of ductile and brittle metal films

Jan Siegel · Applied Physics A · 1997 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +14

Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation

Xiaomei Wang, James R. Leger, R. H. Rediker · Applied Optics · 1997 · 42 citations

Engineering, Manufacturing Engineering, Materials Engineering +14