Photo-initiated deposition and etching of materials relevant to semiconductor devices

Laser-induced periodic surface structure. I. Theory

J. E. Sipe, Jeff F. Young, J. S. Prestón et al. · Physical review. B, Condensed matter · 1983 · 1.3K citations

Natural Sciences, Physics, Optics +16

The etching of silicon with XeF2 vapor

Harold F. Winters, J. W. Coburn · Applied Physics Letters · 1979 · 303 citations

Engineering, Materials Engineering, Materials Science +17

Surface processes in plasma-assisted etching environments

Harold F. Winters, J. W. Coburn, T. J. Chuang · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1983 · 267 citations

Natural Sciences, Materials Engineering, Materials Science +17

Electronic structures of metal hexacarbonyls

Nancy A. Beach, Harry B. Gray · Journal of the American Chemical Society · 1968 · 258 citations

Natural Sciences, Chemistry, Materials Science +6

Organometallic photochemistry

Journal of Organometallic Chemistry · 1980 · 215 citations

Natural Sciences, Chemistry, Analytical Chemistry +7